76177383
Dec 7, 2000
Oct 12, 2004
Machines utilizing high-vacuum technology, namely, machines for depositing very thin films of materials, machines for producing sources of high vacuum, machines for impregnating electrical components and machines for effecting molecular beam epitaxy; sputter coating machines; machines for etching or removing organics from specimens; machines for preparing samples for chemical and physical analysis with low-temperature plasma oxidation; cluster flanges; machines containing thermal evaporation sources, sputtering sources, substrate heaters, ion sources, dies of graphite or metal, crucibles, and manipulators; couplings for machines; transmissions for machines other than land vehicles; vacuum pumps for machines; replacement parts for the aforesaid goods
Machinery