79273040
Aug 23, 2019
OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLSLIMITED TRADING AS OXFORD INSTRUMENTS PLASMA TECHNOLOGY
Apparatus and instruments for thin film processing; apparatus and instruments for thin film processing namely, atomic layer deposition tools, chemical vapour deposition tools, etch tools and cluster tools; apparatus and instruments for thin film processing namely, atomic layer deposition tools, etch tools and cluster tools with automated handling; flexible plasma processing apparatus for plasma etching and plasma deposition
Machinery