74427141
Aug 23, 1993
May 30, 1995
machine parts, namely single and two-stage rotary pumps in standard and chemical resistance versions, roots and diffusion pumps, pneumatic vacuum valves, manual vacuum valves, electromagnetic vacuum valves and thin-film deposition machines used in electronic optical and metallurgical industries
Machineryvacuum induction furnaces, vacuum ovens, vacuum furnaces and vacuum dryers
Environmental Control Apparatus