TEGAL

SEMICONDUCTOR PROCESSING TOOLS, NAMELY, ETCHING TOOLS FOR USE IN ETCHING INTEGRATED CIRCUITS, THIN FILM HEADS, FLAT PANEL DISPLAYS, AND PRINTER HEADS, AND FOR ETCHING CONVENTIONAL, NON-VOLATILE, AND LOW VOLATILITY MATERIALS AND FILMS, INCLUDING PLATINUM, IRIDIUM, IRIDIUM OXIDE, BARIUM STRONTIUM TITANATE (BST), STRONTIUM BISMUTH TITANATE (SBT), STRONTIUM TITANATE (STO), RUTHENIUM, RUTHENIUM OXIDE, LEAD ZIRCONIUM TITANATE (PZT), IRON, NICKEL, AND COPPER, IN THE FORMATION OF SEMICONDUCTOR DEVICES; COMPUTER HARDWARE USED WITH SEMICONDUCTOR PROCESSING TOOLS; SPARE PARTS FOR SEMICONDUCTOR PROCESSING TOOLS, NAMELY, ELECTRODES, CHUCKS, SIDEWALLS, WAFER TRANSPORTS, AND OTHER SEMICONDUCTOR PROCESSING TOOL REPLACEMENT PARTS

PROVIDING ONGOING SERVICING, MAINTENANCE AND REFURBISHING FOR SEMICONDUCTOR PROCESSING TOOLS

DEVELOPING PROCESSES FOR SEMICONDUCTOR PROCESSING TOOLS, NAMELY, DESIGNING AND DEVELOPING ETCHING MACHINERY INCORPORATING ADVANCED ETCHING PROCESSES, AND DEVELOPING CUSTOM ETCHING PROCESSES