76535673
Aug 8, 2003
Jan 18, 2005
NON-MEDICAL, SCIENTIFIC, LABORATORY AND PRODUCTION DETECTION DEVICES WHICH USE X-RAY REFLECTION FLUORESCENCE ANALYZING TECHNOLOGY AND X-RAY ABSORPTION-EDGE FINE STRUCTURE TECHNOLOGY FOR USE IN THE SEMICONDUCTOR, CATALYST CHEMISTRY, MATERIAL CHEMISTRY AND BIOCHEMISTRY INDUSTRIES WHICH ALLOW THE DETECTION, MEASUREMENT, ANALYSIS AND EVALUATION OF FILM THICKNESS OF PROPERTIES AND METALLIC CONTAMINATION ON WAFER SURFACES
Electrical and Scientific Apparatus