79040504
Apr 3, 2007
Jun 24, 2008
Coating equipment, namely, high vacuum physical vapour deposition (PVD) coating equipment for the coating of thin films on technological substrates such as optical, or semiconductor products, using electrically, inductively or electron beam heated evaporators; vapour deposition equipment, namely, high vacuum physical vapour deposition (PVD) coating equipment for the coating of thin films on technological substrates such as optical, or semiconductor products, using electrically or electron beam heated evaporators; plasma-supported high vacuum vapour deposition installations, namely, radio frequency-plasma supported high vacuum physical vapour deposition (PVD) coating equipment; radio frequency-plasma-supported high vacuum vapour deposition, namely, radio frequency plasma supported high vacuum physical vapour deposition (PVD) coating equipment
Machinery