76395784
Apr 5, 2002
Semiconductor wafer processing machines and component parts therefor for making thyristor-based semiconductor devices, thyristor-based integrated circuits and thyristor-based computer memory; and user manuals for use with, and sold as a unit with, the aforesaid machines
MachineryThyristor-based semiconductor devices; thyristor-based integrated circuits; and thyristor-based computer memory
Electrical and Scientific Apparatus