76113510
Aug 21, 2000
Jun 17, 2003
mating ports in the nature of machines used in the transfer of semiconductor wafers and reticles to and from a sealed container; automated robotic transfer equipment comprised of robots, computer hardware, and software all sold as a unit used in the manufacture, storage, transport and protection of semiconductor wafers and reticles
Machineryelectromechanical humidity, temperature and contamination controls for use in the manufacture, transfer and storage of semiconductor wafers and reticles
Electrical and Scientific Apparatusminienvironments, namely, sealed-environment apparatus comprised of laminar airflow systems and enclosures, for use with the semiconductor manufacturing equipment of others
Environmental Control Apparatus