SUSHI MEMS

Optical sensors for detecting physical changes or chemical reactions through the reflection of light; gas sensors for measuring gas concentration; acceleration sensors; inclination sensors for measuring gradient through acceleration detection; pressure sensors; infrared sensors for measurements in ear thermometers or non-contact measurement equipment; flow sensors, namely, mass flow sensors and air velocity sensors for the regulation of air or gas flow; strain sensors for detecting solid changes in shape; magnetic sensors for global positioning system (GPS) correction for cellular phones or personal digital assistants (PDAs); taste sensors for detecting salinity concentration, acid degree or protein material; bio-sensors, namely, chemical sensors for using or copying bio-ability of material recognition; microphones; RF switches; RF resonators and RF filters