Mark Identification
SUB' TOMIC
Serial Number
76316087
Filing Date
Sep 24, 2001
Registration Date
Mar 2, 2004
Trademark by
Classification Information
METROLOGY TOOL, NAMELY, LASERS FOR IN-LINE PROCESS CONTROL OF ULTRA-THIN GATE OXIDES, FOR IN-LINE PROCESS CONTROL IN INTEGRATED CIRCUIT PRODUCTION, AND FOR OPTICAL MEASUREMENT IN PATTERNED SEMICONDUCTOR WAFERS
Electrical and Scientific Apparatus