STAR 150

Heat treating, cleaning, etching, implanting and leveling machines for use in the manufacture of semiconductors; special tooling for the aforesaid goods; and manuals and software sold as a unit with the aforesaid goods

Lithographic and implanting machines for producing images, and printing or implanting images on wafers and other substrates, electron-beam columns and systems; reticles and masks for use with said lithographic and implanting machines; interactive maintenance guide software to decrease customer support costs by reducing MTTR, improving stepper uptime, and enhancing the overall quality of manufacturer service activities of stepper machines; software to optimize stepper performance for the production of semiconductor chips; software for use with heat treating, cleaning, etching, implanting and leveling machines for use in the manufacture of semiconductors; special tooling for the aforesaid goods; and manuals sold as a unit with the aforesaid goods