SPECTRA

Device processing tools, namely plasma etching reactors, namely, plasma source hardware, reactor process chambers, reactor gas handling units, RF generator power supplies, and workpiece handling devices, computer controllers, circuit boards all sold as a unit for cleaning, etching and treating applications; spare parts for plasma etching reactors; refurbished plasma etching reactors and plasma source hardware for plasma etching reactors

Computer software used to control process steps for plasma etching reactors