components and systems for surface analysis, in particular surface analyzers for electron spectroscopy (XPS, UPS, AES, ISS), sputtered neutrals and secondary ion mass spectroscopy (SIMS, SNMS), laser microprobe mass analysis low energy electron diffraction (LEED), electron energy loss spectroscopy (EELS) and relection high energy electron diffraction, secondary electron detectors, ion mass spectrometers, sputtered neutrals and secondary ion mass spectrometers, photo-electron spectrometers, ion source flood guns, electron analyzers, reverse view leeds, laser microprobe mass analysis instruments, calculating machines, data processing apparatus and computers, programs recorded on data carriers, in particular computer programs and operating systems, parts of and accessories to all aforementioned goods
Electrical and Scientific Apparatus