97347125
Apr 5, 2022
Computer hardware and recorded software systems for the installation, operation, maintenance, and repair of semiconductor manufacturing machines, semiconductor substrates manufacturing machines, semiconductor wafer processing machines; Downloadable interactive multimedia computer program for the installation, operation, maintenance, and repair of semiconductor manufacturing machines, semiconductor substrates manufacturing machines, semiconductor wafer processing machines; Measurement apparatus and instruments for use in semiconductor manufacturing, semiconductor substrates manufacturing, and semiconductor wafer processing; Components for semiconductor manufacturing machines, namely, electrodes, chucks, pedestals, o-rings, edge rings, mechanisms for sealing, calibrators, actuators, measurement sensors, operating software, controllers, transducers, signal transmitters, signal receivers, coaxial cables, fiber optic cables, sensors, showerhead for semiconductor manufacturing, pumps, vacuums, pipes, tubes, feed lines, fans for delivery and exhaust of liquid and gas, power supplies, power cables; Components for semiconductor substrates manufacturing machines, namely, electrodes, chucks, pedestals, o-rings, edge rings, mechanisms for sealing, calibrators, actuators, measurement sensors, operating software, controllers, transducers, signal transmitters, signal receivers, coaxial cables, fiber optic cables, sensors, showerhead for semiconductor manufacturing, pumps, vacuums, pipes, tubes, feed lines, fans for delivery and exhaust of liquid and gas, power supplies, power cables; Components for semiconductor wafer processing equipment, namely, electrodes, chucks, pedestals, o-rings, edge rings, mechanisms for sealing, calibrators, actuators, measurement sensors, operating software, controllers, transducers, signal transmitters, signal receivers, coaxial cables, fiber optic cables, sensors, showerhead for semiconductor manufacturing, pumps, vacuums, pipes, tubes, feed lines, fans for delivery and exhaust of liquid and gas, power supplies, power cables; Components for semiconductor wafer processing machines, namely, electrodes, chucks, pedestals, o-rings, edge rings, mechanisms for sealing, calibrators, actuators, measurement sensors, operating software, controllers, transducers, signal transmitters, signal receivers, coaxial cables, fiber optic cables, sensors, showerhead for semiconductor manufacturing, pumps, vacuums, pipes, tubes, feed lines, fans for delivery and exhaust of liquid and gas, power supplies, power cables; Measuring apparatus for measuring semiconductor wafer mass and mass changes occurring in the semiconductor manufacturing process, for use in the semiconductor manufacturing industry; Artificial intelligence- and machine learning-enabled recorded computer software supporting platforms for big data for use in fully automated and self-learning manufacture, fabrication, processing, cleaning, polishing, diagnostics, support, and maintenance of semiconductors, semiconductor wafers, integrated circuits, and substrates incorporating semiconductors; Computer hardware and recorded software systems for technical advice related to the installation, maintenance, and repair of semiconductor manufacturing machines, semiconductor substrates manufacturing machines, semiconductor wafer processing equipment, semiconductor wafer processing machines; Downloadable interactive multimedia computer program for technical advice related to the installation, maintenance, and repair of semiconductor manufacturing machines, semiconductor substrates manufacturing machines, semiconductor wafer processing equipment, semiconductor wafer processing machines
Electrical and Scientific Apparatus