SPARTAN

Machines for handling semiconductor wafers; robots for handling semiconductor wafers; material handling machines for loading and unloading semiconductor wafers from a pod or manufacturing container and transferring said wafers to a semiconductor manufacturing processing tool; material handling machines for loading and unloading semiconductor wafers to and from pods or manufacturing containers; factory automation machines for loading and unloading wafers, pods or containers [, flat panel displays, magnetic media, and reticles ] during the manufacture of same

Computer hardware and related computer software for controlling material handling machines, robots, and factory automation equipment