SPARCLEAN
Mark Identification

SPARCLEAN

Serial Number

88014243

Filing Date

Jun 25, 2018

Trademark by

MKS INSTRUMENTS INC.

Classification Information

Plasma generator for etching, atomic later etch, sputtering, chemical vapor deposition, atomic layer deposition, ion implantation, cleaning, chamber clean, ion milling, sterilization, material engineering through assisting plasma, surface preconditioning, and surface preparation

Machinery