SOURCE METROLOGY INSTRUMENT (SMI)

Components of optical instruments for use in the semiconductor industry, namely, apparatus comprised of computer software for use in analyzing data received from an image capture tool and in-situ imaging objectives of the pinhole, refractive or reflective kind, in the same form factor as a standard reticle for use in exposing photographically prepared patterns and images that are used for measuring and aiming to the surfaces of wafers for use in manufacturing of integrated circuits