SOLARUS

radio frequency-generated gas plasma cleaning chamber for the removal of hydrocarbon contamination from the surface of electron microscope samples and holders; incorporating a port for the deposit of microscope samples and holders, a gas plasma generater and flow controller, a radio frequency (RF) power generator, turbomolecular and multistage diaphragm pumps for vacuuming gas plasma from the cleaning chamber, and computer hardware and software for operation of the cleaning chamber