78248453
May 12, 2003
Mar 15, 2005
Machines and structural parts therefor, for the production, treatment, transport and processing of electronic components, especially semiconductors, in the fields of microelectronic, medical technology, biotechnology, semiconductor technology and microsystems technology; machines and structural parts therefor for the production, treatment and processing of semiconductors; machines and structural parts therefore for the treatment of surfaces of electronic components
Machinery