76362851
Jan 24, 2002
Oct 6, 2009
Active Trademark
Semiconductor wafer processing equipment and components, namely, epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanters, and chemical mechanical polishers; and operational software sold as a component of the forgoing; all for the processing and production of semiconductor substrates, thin films, silicon discs and wafers
Electrical and Scientific Apparatus