SILICON VALLEY GROUP, INC.

APPARATUS USED IN THE MANUFACTURE OF SEMICONDUCTORS, NAMELY, AUTOMATED WAFER VIEWS; AUTOMATIC WATER CLEANERS; WAFER ABRADERS; WAFER EDGE GRINDERS; WAFER TRANSFORMERS; WAFER INDEX STATIONS; WAFER TRANSPORTERS AND REACTORS, PHOTORESIST PROCESSORS, NAMELY, HOT PLATE OVENS FOR HEATING A SILICON WAFER; INFRARED OVENS; PHOTORESIST COATERS; PHOTORESIST DEVELOPERS; PHOTOGRAPHIC APPARATUS FOR THE MANUFACTURING OF SEMICONDUCTORS; PROJECTION PRINTING UNIT FOR PROJECTING A MASK DESIGN ONTO CONTROLLERS FOR SEMICONDUCTOR WAFER DIFFUSION FURNACES AND APPERTINENT APPARATUS, INCLUDING AUTOMATIC COMPUTER FURNACE OPERATION CONTROLLERS; HEAT TREATING FURNACES AND PARTS THEREFOR AND RELATED EQUIPMENT, NAMELY, HORIZONTAL AND VERTICAL CHEMICAL VAPOR DEPOSITION APPARATUS FOR COATING AND PROCESSING SEMICONDUCTOR WAFERS, AND PARTS THEREFOR, INCLUDING REPLACEABLE QUARTZ COMPONENTS

ELECTRICALLY HEATED DIFFUSION FURNACES FOR INDUSTRIAL USE, AND PARTS THEREOF