78604474
Apr 8, 2005
Electronic semi-conductors; electric resistors, capacitors, and coils; silicon wafers; silicon pillars for microfluidic applications; cantilevers for sensor applications; silicon optical mirrors, namely, customizable chips containing movable micromirror arrays made of monocrystalline silicon that can be controlled by applying electrostatic forces; silicon optical benches, namely, silicon substrates made of a combination of various oxide, polymer, and metal layers that serve as a general carrier of optical and electrical components for optical lasers, fibers, and lenses
Electrical and Scientific Apparatus