75823321
Oct 14, 1999
Oct 22, 2002
NON-INVASIVE SYSTEMS, NAMELY, COMPUTER SOFTWARE, INTRA-FAB SENSORS, AND ELECTRICAL DEVICES, NAMELY, RF-RADIOS, LOW-FREQUENCY RADIOS, BLUE-TOOTH DEVICE, SPREAD-SPECTRUM RADIOS, ALL ASSOCIATED WITH SEMICONDUCTOR FABRICATION FOR REMOTELY CONTROLLING, MONITORING AND DIAGNOSING POTENTIAL MALFUNCTIONS OF SEMICONDUCTOR FABRICATION EQUIPMENT AND COMPONENTS, SUCH AS VALVE, CRYO PUMP, AND VACUUM PUMP
Electrical and Scientific Apparatus