75314765
Jun 25, 1997
Jun 19, 2001
substrate, namely, a conductive, semi-conductive, or non-conductive material, used for the manufacture of articles such as semiconductor wafers, disks, integrated circuit devices, flat panel displays, piezoelectronic devices, photonic devices, microelectromechanical systems, sensors, actuators, solar cells, biological and biomedical devices, and the like
Electrical and Scientific Apparatus