SENTINEL
Mark Identification

SENTINEL

Serial Number

77771069

Filing Date

Jun 30, 2009

Trademark by

NANOMETRICS INCORPORATED

Classification Information

Optical inspection system for semiconductor wafers in various stages of processing, said system comprised of imaging cameras, optical filters, control computer, and monochromatic illumination source comprised of laser and LED light sensors, the foregoing used to illuminate semiconductor wafers by ultra violet, infra-red and visible light, and thereby to acquire a spatial or spatial/spectral image of the band-edge luminescence emitted by the wafer using an imaging camera

Electrical and Scientific Apparatus