78407416
Apr 23, 2004
May 9, 2006
Optical and laser non-contact measuring systems comprised of non-contact sensing devices and software, namely confocal microscopy, white light interferometer, phase shift interferometer, vertical scanning interferometer and laser profilometer, and computer software to control the physical motion of the instrument and to acquire and analyze data of the texture and form of a surface, used to measure and evaluate surfaces or boundary layers
Electrical and Scientific Apparatus