76179523
Dec 12, 2000
EQUIPMENT AND INSTRUMENTS FOR MEASURING STATIC AND DYNAMIC PROPERTIES OF MICROMECHANICAL CANTILEVERS, NAMELY, CHEMICAL AND BIOCHEMICAL SENSORS FOR DETECTING TARGET SUBSTANCES IN GAS AND LIQUID, SPECIFICALLY RELATED TO THE DETECTION, MEASUREMENT, AND ANALYSIS OF VARIOUS SUBSTANCES IN PROXIMITY OF THE CANTILEVERS
Electrical and Scientific Apparatus