98020003
May 30, 2023
Recorded computer software comprising a library of 3d models and design tools for computer aided design of micro-electro-mechanical systems (MEMS); Recorded computer software for designing and manufacturing semiconductors and micro-electro-mechanical systems (MEMS); Recorded computer software for virtual prototyping of three-dimensional models for the design of semiconductor devices; Recorded computer simulation software for modeling semiconductor manufacturing; Recorded computer simulation software for modeling plasma; Recorded virtual reality and augmented reality software for the design, development, manufacture, processing, and fabrication of semiconductor substrates and devices; Recorded virtual reality and augmented reality software for the installation, operation, maintenance, and repair of semiconductor manufacturing machines, semiconductor substrates manufacturing machines, semiconductor wafer processing machines; Computer hardware and recorded software systems for the installation, operation, maintenance, and repair of semiconductor manufacturing machines, semiconductor substrates manufacturing machines, semiconductor wafer processing machines; Downloadable interactive multimedia computer program for the installation, operation, maintenance, and repair of semiconductor manufacturing machines, semiconductor substrates manufacturing machines, semiconductor wafer processing machines; Components for semiconductor manufacturing machines, substrate manufacturing machines, wafer processing machines, wafer processing equipment, namely, electrodes, electrostatic chucks, pedestals with signal transmitter, o-rings with readable circuitry antenna or signal transmitter, edge rings with readable circuitry antenna or signal transmitter, mechanisms for sealing with readable circuitry antenna or signal transmitter, electronic calibrator, electric actuators, electric measurement sensors, recorded operating software for operating semiconductor manufacturing machines, semiconductor substrates manufacturing machines, semiconductor wafer processing machines, and wafer processing equipment, electrical controllers, transducers in the nature of electrical transducers and electro-optic transducers, electronic signal transmitters, electronic signal receivers, coaxial cables, fiber optic cables, Pressure and optical sensors, showerhead having electronic sensors and signal transmitters, pumps with electronic sensors and signal transmitters, vacuum gauges with electronic sensors and signal transmitters, pipes with electronic sensors and signal transmitters, tubes for chemicals with sensors or electronic circuitry or signal transmitter, feed lines with sensors or electronic circuitry or signal transmitter, fans with electronic sensors and signal transmitters, power supplies electrical, power cables, doors with electronic sensors and signal transmitters, windows with electronic sensors and signal transmitters, and chamber walls with electronic sensors and signal transmitters all for semiconductor manufacturing machines, semiconductor substrates manufacturing machines, semiconductor wafer processing machines, and wafer processing equipment; Semiconductor Measurement machines; semiconductor substrate measuring machines; semiconductor wafer measuring machines
Electrical and Scientific Apparatus