73341456
Dec 14, 1981
May 31, 1983
Polycrystal Silicon in the Form of Rods or Chips for Semiconductor Use; Single Crystal Silicon in the Form of Rods or Wafers for Semiconductor Use; Silicon Epitaxial Wafers for Semiconductor Use; Single Crystal Group III-V Compound in the Form of Rods or Wafers for Semiconductor Use; Epitaxial Wafers of Group III-V Compound for Semiconductor Use
Electrical and Scientific Apparatus