SAVANNAH
Mark Identification

SAVANNAH

Serial Number

77769407

Filing Date

Jun 26, 2009

Registration Date

Aug 31, 2010

Trademark by

VEECO INSTRUMENTS INC.

Active Trademark

Classification Information

Atomic layer deposition machines for a variety of coating applications, namely, gate dielectrics, gate electrodes, metal interconnects, diffusion barriers, DRAM, multilayer-capacitors, read heads, antireflection, optical filters, OLED layers, photonic crystals, transparent conductors, electroluminescence, solar cells, lasers, integrated optics, MEMS, etch resistance, hydrophobic / antistiction, blade edges, molds and dies, solid lubricants, anti corrosion, inside pores, nanotubes, around particles AFM tips, chemicals, catalysis, fuel cells, roll to roll, internal tube liners, nano-glue, biocompatible, and magnetics, among others; semiconductor wafer processing machines; deposition machines comprised in part of a reaction chamber, precursor lines, and a cabinet for coating

Machinery