73759444
Oct 24, 1988
Mar 27, 1990
ELECTRICAL EQUIPMENT USED IN THE SEMI-CONDUCTOR INDUSTRY FOR THE PREPARATION AND STRIPPING OF THIN FILMS, NAMELY, METAL ORGANIC CHEMICAL VAPOR DEPOSITION APPARATUSES, PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION APPARATUSES, AND UV-OZONE DRY STRIPPER CLEANING APPARATUSES FOR STRIPPING PHOTO RESIST, AND CLEANING CHROME MASKS, BONDING PADS, DIES AND WAFERS
Electrical and Scientific Apparatus