Research and design of semiconductor wafer processing machines and semiconductor wafer processing equipment; research and development in the field of semiconductor processing technology; research and development of advanced lithography technology for semiconductor manufacturing; providing online non-downloadable computer software for use in connection with processing semiconductor wafers; providing online non-downloadable computer software for use in connection with operating, monitoring, controlling, calibrating, diagnosing, and optimizing semiconductor manufacturing tools; providing online non-downloadable computer software for the development of advanced semiconductor lithography; computer software programming services for others in the semiconductor industry; custom design and engineering of semiconductor facilities; custom design and engineering of semiconductor manufacturing machinery and systems
Computer and Scientific