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Machines and machine tools for the manufacturing and processing of microstructure elements, namely semiconductor manufacturing and semiconductor processing machines; automated machines and systems for cleaning, coating, developing, etching and strip coating of substrates, especially semiconductor substrates, hard discs, silicon discs, wafers, photomasks, hardmasks or embossing masks, templates, structure masks and substrates; semiconductor wafer processing machines; machines for wafer bonding; machines for debonding of micro-structure elements such as chips or wafers from their carriers; machines, namely coating machines for coating micro-structure elements and nano-structure elements; machines, namely mask aligners in the nature of nature of photolithographic machines and chip manufacturing machines; manufacturing machines being mask aligners, namely micro and nano imprinters for industrial use; lithographic machines for the processing of micro-structure or nano-structure elements; laser engraving machines for the semiconductor industry; photomask and wafer processing machines for the semiconductor industry; photomask and wafer processing machines for photomask applications; photomask and wafer processing machines for the manufacturing and processing of opto-electronics; photomask and wafer processing equipments for the manufacturing and processing of semiconductor back-ends (MEMS); photomask and wafer processing equipments for the manufacturing of organic light emitting diodes (OLED).

Control software downloadable and recorded for operating machines in the field of manufacturing and processing semiconductors and printed circuits and microstructural elements; projection scanner for projection lithography; optical scanners; optical printers.