75429137
Feb 5, 1998
Aug 15, 2000
SEMICONDUCTOR AND ELECTRONIC FABRICATION EQUIPMENT, NAMELY SEMICONDUCTOR MATERIAL PROCESSING CHAMBERS, SEMICONDUCTOR MATERIAL PROCESSING HEATERS, SEMICONDUCTOR MATERIAL GAS INJECTORS, SEMICONDUCTOR MATERIAL EMITTER DETECTORS, SEMICONDUCTOR MATERIAL PROCESSING SUPPORT PLATFORMS, AND SEMICONDUCTOR MATERIAL PROCESS CONTROLLERS, NAMELY SEMICONDUCTOR MATERIAL PROCESS CONTROL SOFTWARE AND SEMICONDUCTOR MATERIAL PROCESS CONTROL COMPUTERS ALL SOLD AS A SYSTEM
Electrical and Scientific Apparatus