Classification Information
Computer hardware and downloadable and prerecorded computer software for testing, inspecting, characterizing, and predicting physical and electrical properties of semiconductors, integrated circuits, microelectronics, wafers, and lithographic masks; overlay metrology and measurement tools, namely, industrial and electronic equipment for testing, inspecting, and characterizing physical properties of semiconductors and integrated circuits; computer hardware and downloadable and prerecorded computer software for use in process control and yield management for the semiconductor, integrated circuit and related microelectronics manufacturing industries
Electrical and Scientific Apparatus