RIVOS

Apparatus and instruments for thin film processing, namely, thin film processing machines; apparatus and instruments for thin film processing namely, power operated atomic layer deposition tools, power operated chemical vapour deposition tools, power operated etch tools and power operated cluster tools; apparatus and instruments for thin film processing namely, power operated atomic layer deposition tools, power operated etch tools and power operated cluster tools with automated handling; flexible ion beam processing systems for ion beam etching and ion beam deposition, namely, machines and machine tools for ion beam etching and deposition