R3 SF6 RECOVER, RECYCLE, AND RETURN

Gas recycling system comprised primarily of one or more of the following pieces of equipment, namely, pressure swing adsorption equipment, temperature swing adsorption equipment, perm selective membrane equipment, solvent extraction equipment, pervaporation equipment or solid adsorption equipment, for the recovery, purification and return of gases in industrial applications; Gas recycling system comprised primarily of pressure swing adsorption equipment for the recovery, purification and return of gases in industrial applications