76326192
Oct 17, 2001
Mar 31, 2009
EVAPORATION AND SPUTTERING VACUUM DEPOSITION COATERS, CONSISTING OF VACUUM PUMPS, ELECTRON BEAM EVAPORATORS, RF ION SOURCE, OPTICAL FILM THICKNESS CONTROLLER, CRYSTAL DEPOSITION MONITOR, VACUUM CHAMBER, CONTROL PANEL, PROCESS-CONTROL SOFTWARE AND SUBSTRATE HEATING AND ROTATION DEVICES
MachineryOPTICAL MEASURING APPARATUS AND EQUIPMENT, NAMELY, MEASUREMENT OF DENSE WAVELENGTH DIVISION MULTIPLEXING (DWDM) FILTERS AND OPTICAL FILTER COMPONENTS THEREFOR; OPTICAL THICKNESS MONITORS, CONSISTING OF LIGHT SOURCE AND POWER SUPPLIES; OPTICAL DETECTOR AND AMPLIFIER; SPECTROPHOTOMETER; OPTICAL SPECTRUM ANALYZER; ION SOURCES, CONSISTING OF RADIO FREQUENCY COILS AND POWER SUPPLY, GRIDS, QUARTZ CHAMBER, HIGH VOLTAGE POWER SUPPLY, GAS CONTROLLER, AND CONTROL SOFTWARE
Electrical and Scientific Apparatus