QUAESTOR

ELECTRONIC APPARATUS FOR THE INSPECTION AND AUTOMATIC MEASUREMENT OF THE DIMENSIONS OF FEATURES ON SEMI-CONDUCTOR WAFERS, COMPRISING; A WAFER HANDLING UNIT WITH CASSETTE ELEVATORS, STAGE, IMAGING UNIT, ADJUSTABLE BINOCULAR INSPECTION UNIT, ILLUMINATION MODULE, VIBRATION FREE BRIDGE, MEASUREMENT UNIT, CAMERA, MONITOR, KEYBOARD AND KEYPAD