90129797
Aug 21, 2020
Machines for contamination control in semiconductor device manufacturing; machines for cleaning wafer carriers; machines for cleaning reticle carriers; machines for inspecting wafer carriers; machines for inspecting reticle carriers; semiconductor wafer processing equipment, namely, machines using cameras and illumination systems to detect defects and/or contamination in wafer carriers; semiconductor reticle processing equipment, namely, machines using cameras and illumination systems to detect defects and/or contamination in reticle carriers; machines for semiconductor device manufacturing
Machinery