76037919
Apr 28, 2000
Filters for filtering chemicals introduced into copper plating for use in the microelectronics industry
MachineryPackaged copper anodes for use in copper plating and fluid handling systems, both for use in the microelectronics industry
Electrical and Scientific ApparatusGas diffusers for diffusing gas into copper plating baths and liquid degassers for degassing copper plating solutions, both for use in the microelectronics industry
Environmental Control Apparatus