Computer hardware for testing and inspecting physical and electrical properties of semiconductors, integrated circuits, microelectronics, wafers, and lithographic masks; computer software for use in process control and yield management for the semiconductor, integrated circuit and related microelectronics manufacturing industries; computer software for testing and inspecting physical and electrical properties of semiconductors, integrated circuits, microelectronics, wafers, and lithographic masks; computer software for providing analytic data on the performance of inspection and metrology tools; computer hardware and computer software for testing and inspecting the ability of a lithography scanner to align and print layers and masks onto integrated circuits and wafers; lithography process control equipment for overlay metrology, namely, inspection, metrology and testing hardware
Electrical and Scientific Apparatus