PRIMO D-RIE

Installation, maintenance and repair of semiconductor wafer processing equipment and components for use therewith; installation, maintenance and repair of deposition processing equipment, etch processing equipment, electrochemical plating equipment, rapid thermal processing equipment, chemical mechanical polishers, and supporting frames and parts thereof; installation, maintenance and repair of vacuum processing equipment and components for use therewith; installation, maintenance and repair of liquid crystal display processing equipment, flat panel display processing equipment, vacuum plating equipment, optical coating equipment, and supporting frames and parts thereof