PRIMO D-RIE

Semiconductor wafer processing equipment and components for use therewith, namely, deposition processing equipments, etch processing equipment, electrochemical plating equipment, rapid thermal processing equipment, and chemical mechanical polishers, supporting frames and parts thereof; vacuum processing equipment and components for use therewith, namely, liquid crystal display processing equipment, flat panel display processing equipment, vacuum plating equipment and optical coating equipment, and supporting frames and parts thereof