Mark Identification

PRECLEAN-ETCH MODULE

Serial Number

75563355

Filing Date

Oct 1, 1998

Trademark by

TOKYO ELECTRON KABUSHIKI KAISHA

Classification Information

Machines for manufacturing semiconductors, crystal liquid devices, printed circuit boards, masks, reticles, floppy disks, magnetic tapes and keyboards

Machinery

diffusion and oxidation furnaces for thermally processing semiconductors

Environmental Control Apparatus