PRECISION TO THE NTH DEGREE

MACHINE PARTS, NAMELY, BEARINGS, AIRBEARINGS, HYDRODYNAMIC AIRBEARINGS; ELECTRONIC DRIVES WHICH ENABLE MOTORS TO MOVE; AND MOTORS AND STRUCTURAL PARTS THEREFOR FOR MOTION CONTROL AND SENSOR APPARATUS; MANUFACTURING, ASSEMBLY AND TEST MACHINERY

MOTION AND CONTROL SENSOR COMPONENTS AND PARTS THEREFORE, NAMELY, RESOLVERS, TACHOMETERS, SYNCHROS, ACTUATORS, SCANNERS, LASER INTERFEROMETERS, AUTOFOCUS, MICRO AND NANO POSITIONING STAGES AND ROTARY SERVO SYSTEMS COMPRISING SOME OR ALL OF THE FOREGOING SOLD AS A UNIT; PRECISION OPTICS, NAMELY, LENSES FOR FOCUSING AND DEFLECTING LIGHT, LASER BEAMS, INFRARED AND THERMAL ENERGY; PRECISION METAL OPTICS, NAMELY METAL OPTIC MIRROR FOR REFLECTING LIGHT, LASER BEAMS, INFRARED OR THERMAL ENERGY; MOTION SYSTEMS USED IN MANUFACTURING, ASSEMBLY, INSPECTION AND TEST MACHINERY COMPRISED OF MICRO AND NANO POSITIONING STAGES, CONTROL SOFTWARE USED FOR COMPUTER CONTROL OF THE MOTION, VISION AND OTHER MATERIAL HANDLING PROCESSES OF THE MANUFACTURING, ASSEMBLY, INSPECTION AND TEST MACHINERY