79290579
Mar 10, 2020
Equipment for semiconductor manufacturing including CVD (chemical vapor deposition) and MOCVD (metallorganic) epitaxial reactors, bubblers for low volatile semiconductor precursors; physical vapor transport (PVT) sublimators for compound materials growth, high temperature chemical vapor deposition (HTCVD) reactors for compound materials growth, LPCVD (low pressure chemical vapor deposition) reactors, equipment for high temperature wafer treatment
MachineryEpitaxially coated semiconductor wafers; operational software; software for the control of equipment for semiconductor manufacturing
Electrical and Scientific Apparatus