PMS

Installation, maintenance and repair services, namely, installation, maintenance and repair of computer hardware for sensing, monitoring, and analyzing various solids, liquid and gaseous contaminants, and hydrogen peroxide concentrations, counting contaminant particles, monitoring of polishing and planarization slurries, and cleanliness testing

Education and training services, namely, offering training programs and seminars tailored to the operation, maintenance, repair and calibration of systems for sensing, monitoring, and analyzing various solid, liquid and gaseous contaminants, and hydrogen peroxide concentrations, counting contaminant particles, monitoring of polishing and planarization slurries, and cleanliness testing

Installation, maintenance and repair services, namely, installation, maintenance and repair of computer software for sensing, monitoring, and analyzing various solid, liquid and gaseous contaminants, and hydrogen peroxide concentrations, counting contaminant particles, monitoring of polishing and planarization slurries, and cleanliness testing; development of computer programs for manufacturing process characterization and design relating to contaminants, cleanliness, and hydrogen peroxide concentrations; development of computer programs for trouble shooting of manufacturing processes relating to contaminants, cleanliness, and hydrogen peroxide concentrations; development of computer programs for design of product validity procedures, testing methods and techniques related to contaminants, cleanliness, and hydrogen peroxide concentrations; development of computer programs for manufacturing site surveys related to contaminants, cleanliness, and hydrogen peroxide concentrations; development of computer programs for on-site testing for contaminants, cleanliness, and hydrogen peroxide concentrations; development of computer programs for microcontamination testing; development of computer programs for laboratory testing for contaminants, cleanliness and hydrogen peroxide concentrations