PMS

Computer hardware for use in sensing, monitoring, and analyzing various solid, liquid and gaseous contaminants; computer hardware for use in counting contaminant particles; computer hardware for monitoring polishing and planarization slurries; computer hardware for continuous monitoring of hydrogen peroxide concentrations; cleanliness testing stations comprised in part of computer hardware or computer peripherals

[ Maintenance and repair services, namely, maintenance and repair of computer hardware for sensing, monitoring, and analyzing various solid, liquid and gaseous contaminants; maintenance and repair services, namely, maintenance and repair of computer hardware for sensing, monitoring, and analyzing hydrogen peroxide concentrations; maintenance and repair services, namely, maintenance and repair of computer hardware for counting contaminant particles; maintenance and repair services, namely, maintenance and repair of computer hardware for monitoring polishing and planarization slurries; maintenance and repair services, namely, maintenance and repair of computer hardware for cleanliness testing ]