75746074
Jul 9, 1999
material handling machine for use in the manufacturing of semiconductor wafers, reticles, flat panel displays and magnetic media comprising robotic arms, an electronics bay, an electronic identification tag capable of reading infrared, radio frequency or barcode signals, a barcode reader, a display, a keypad, antennas, filtration units, sealed enclosures used to store and transfer semiconductor wafers, reticles, flat panel displays and magnetic media, fans, electromechanical fan controller, reflective laser, pre-aligners which locates and identifies the orientation of a wafer for manufacturing processes, loadports in the nature of cassette transferring interface, and ionizers
MachineryComputer hardware machine; for controlling a material handling computer software for automating, integrating and communicating with material handling machines; optical character recognition apparatus, namely, computer hardware and software for optical character recognition
Electrical and Scientific Apparatus